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Speckle interferometric investigation of argon pressure-induced surface roughness modifications in RF-sputtered MoO[sub]3 film
S. Soumya, R. Arun Kumar, S. Sreejyothi, Vimal Raj, Mohanachandran Nair Sindhu Swapna, Sankaranarayana Iyer Sankararaman, 2021, izvirni znanstveni članek

Opis: Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology. The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm.
Ključne besede: speckle pattern interferometry, time history of speckle pattern, cross correlation, inertia moment
Objavljeno v RUNG: 04.07.2022; Ogledov: 1470; Prenosov: 0
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