| Title: | Speckle interferometric investigation of argon pressure-induced surface roughness modifications in RF-sputtered MoO[sub]3 film |
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| Authors: | ID Soumya, S. (Author)
ID Kumar, R. Arun (Author)
ID Sreejyothi, S. (Author)
ID Raj, Vimal (Author)
ID Swapna, Mohanachandran Nair Sindhu (Author)
ID Iyer Sankararaman, Sankaranarayana (Author) |
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| Files: |
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| Language: | English |
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| Work type: | Unknown |
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| Typology: | 1.01 - Original Scientific Article |
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| Organization: | UNG - University of Nova Gorica
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| Abstract: | Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology.
The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations
of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter
δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic
speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the
flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered
flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of
particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm. |
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| Keywords: | speckle pattern interferometry, time history of speckle pattern, cross correlation, inertia moment |
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| Year of publishing: | 2021 |
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| Number of pages: | str. 1-9 |
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| Numbering: | Vol. 40, no. 1 |
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| PID: | 20.500.12556/RUNG-7466 |
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| COBISS.SI-ID: | 113770499 |
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| UDC: | 53 |
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| ISSN on article: | 0195-9298 |
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| DOI: | 10.1007/s10921-020-00741-x |
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| NUK URN: | URN:SI:UNG:REP:PEIHZWAK |
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| Publication date in RUNG: | 04.07.2022 |
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| Views: | 2008 |
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| Downloads: | 0 |
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