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Speckle interferometric investigation of argon pressure-induced surface roughness modifications in RF-sputtered MoO[sub]3 film
S. Soumya, R. Arun Kumar, S. Sreejyothi, Vimal Raj, Mohanachandran Nair Sindhu Swapna, Sankaranarayana Iyer Sankararaman, 2021, original scientific article

Abstract: Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology. The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm.
Keywords: speckle pattern interferometry, time history of speckle pattern, cross correlation, inertia moment
Published in RUNG: 04.07.2022; Views: 497; Downloads: 0
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Fractal and inertia moment analyses for thin film quality monitoring
Swapna Mohanachandran Nair Sindhu, 2022, original scientific article

Abstract: The widespread applications of thin films in optronics demand innovative techniques for its characterizations. The work reported here proposes electronic speckle pattern interferometry and fractal-based methods for assessing the quality of thin films taking the industrially relevant molybdenum oxide (MoO3) incorporated niobium oxide (Nb2O5) films. The films with different levels of MoO3 incorporation (1, 2, 3, 5, and 10 wt. %) are prepared by radio frequency sputtering. The study reveals the structure modifications of Nb2O5 from the orthorhombic to monoclinic phases with an associated morphological variation revealed through atomic force microscopy and field-emission scanning electron microscopy analyses. The films’ specklegrams are recorded under thermal stress; the inertia moment (IM) and fractal analyses are computed and compared with the root-mean-square surface roughness of the films. The lacunarity analysis of the AFM films agrees well with the specklegrams. Thus, the lower IM and lacunarity values of the specklegrams can be regarded as indicators of the good quality of thin films.
Keywords: cross-correlation, fractal dimension, inertia moment, lacunarity, speckle, surface roughness.
Published in RUNG: 30.06.2022; Views: 496; Downloads: 0
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