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Title:Speckle interferometric investigation of argon pressure-induced surface roughness modifications in RF-sputtered MoO[sub]3 film
Authors:ID Soumya, S. (Author)
ID Kumar, R. Arun (Author)
ID Sreejyothi, S. (Author)
ID Raj, Vimal (Author)
ID Swapna, Mohanachandran Nair Sindhu (Author)
ID Sankararaman, Sankaranarayana Iyer (Author)
Files: This document has no files that are freely available to the public. This document may have a physical copy in the library of the organization, check the status via COBISS. Link is opened in a new window
Language:English
Work type:Unknown
Typology:1.01 - Original Scientific Article
Organization:UNG - University of Nova Gorica
Abstract:Film quality analysis is of more considerable signifcance due to its diversifed applications in various felds of technology. The present work reports the speckle interferometric analysis of the argon pressure-induced surface roughness modifcations of RF sputtered MoO3 flms. The paper suggests a new method of surface quality analysis of thin flms through a parameter δ, which is the diference between the initial and fnal inertia moment values in the study of the thermal-induced dynamic speckle pattern. The limitations of root mean square surface roughness analysis of the atomic force microscopic image of the flms is also exemplifed. The research suggests that argon pressure plays a vital role in the surface property of RF sputtered flms and also that the dynamic speckle analysis can give precise information about the quality of flms. The contour plot of particle displacement vector under thermal stress, suggests the degree of uniformity in the distribution of particles in the flm.
Keywords:speckle pattern interferometry, time history of speckle pattern, cross correlation, inertia moment
Year of publishing:2021
Number of pages:str. 1-9
Numbering:Vol. 40, no. 1
PID:20.500.12556/RUNG-7466 New window
COBISS.SI-ID:113770499 New window
UDC:53
ISSN on article:0195-9298
DOI:10.1007/s10921-020-00741-x New window
NUK URN:URN:SI:UNG:REP:PEIHZWAK
Publication date in RUNG:04.07.2022
Views:1368
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Record is a part of a journal

Title:Journal of nondestructive evaluation
Shortened title:J. nondestr. eval.
Publisher:Springer
ISSN:0195-9298
COBISS.SI-ID:512113689 New window

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